High Resolution X-ray Lithography: Features of Two-dimensional Patterning.
نویسندگان
چکیده
منابع مشابه
Printing meets lithography: Soft approaches to high-resolution patterning
We are developing a high-resolution printing technique based on transferring a pattern from an elastomeric stamp to a solid substrate by conformal contact. This is an attempt to enhance the accuracy of classical printing to a precision comparable with optical lithography, creating a low-cost, large-area, high-resolution patterning process. First, we introduce the components of this technique, c...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 1997
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.10.619